A thermal detector in principle is a very sensitive calorimeter which measures the energy deposited by a single interacting particle through the corresponding temperature rise. For this mechanism to be really effective the detector must have a very small heat capacity: this is accomplished by using suitable materials (dielectrics, superconductors below the phase transition, …) and by running the detector at low temperatures (usualluy below 100 mK) in a refrigerator (we use dilution refrigerators).
A thermal detector is made up by three main components:
Microcalorimeters are a class of thermal detector caracterized by a very small size (less than 1 milligram) and in general by a high energy resolution (few tens of eVs for soft X-rays). The drawing below is a sketch of how they are made.
In a microcalorimeter the thermal and electrical links are provided by Al bonding wires and the small absorber is glued below the thermistor. To achieve the necessary sensitivity the electronic front-end is placed very close to the detector: this reduce the input stray capacitances and therefore both the microphonic noise and signal RC integration.
For our high energy resolution microcalorimeters we use to type of thermistors: silicon implanted and NTD germanium thermistors. Both are doped to such a level that below 1K the electrical conduction regime is the Variable Range Hopping characterized by a resistivity steeply temperature dependent.
Silicon implanted thermistors have been developed in collaboration with IRST in Trento, Italy. They are made by multiple ion implantation on silicon wafers using the planar technology [10]. Their major advantages with respect other sensors are the reproducibility and the possibility of large scale productions. Moreover we are implementing the micromachining to built fully integrated thermistors.
NTD germanium thermistors are made by LBL in California, USA. They are made by exposing a ultrapure germanium single crystal to a nuclear reactor neutron flux. They are characterized by an extreme reproducibility even if they are in part made by hands.